STUDY OF ELECTRIC AND SOME STRAIN-RESISTIVE PROPERTIES OF FILM SENSITIVE ELEMENTS BASED ON BISMUTH-ANTIMONY TELLURIDES
Keywords:
film sensing elements, bismuth and antimony tellurides, strain gauges, strain gauge, thermal deposition, electrical conductivity, resistivity, gauge factor, substrate temperature, evaporation temperature, deposition rateAbstract
The work is devoted to the study of electrophysical and tensometric properties of polycrystalline film sensitive elements based on bismuth-antimony tellurides. The paper considers the influence of the deposition rate on the resistivity and strain-sensitivity coefficient of bismuth-antimony telluride films grown on a polyimide substrate. These dependences show that with an increase in the deposition rate from 10 nm/s to 40 nm/s, the resistivity of the films decreases, and the value of the strain sensitivity coefficient passes through a maximum at 20 nm/s, the amplitude of which is determined by the evaporation temperature.